Diameter

f40mm ~ f102mm

Thickness

0.2~1.2mm

Orientation

X, Z, 36º, 42º, 128º

Ref. flat orientation

X or Y

Ref. Flat width

16±2mm, 18±2mm, 22±2mm, 32±2mm

Front polish

0.016 ~0.001μm

Back lapping

0.3 ~10

Flatness

<10μm for f40 ~ 65mm
<15μm for f65 ~ 102mm

Bow

<20μm for f40~ 65 mm,
<40μm for f65 ~102mm